DOE Science Showcase - MicroElectroMechanical Systems
Credit: Daniel Lopez, Argonne National LaboratoryAdvanced microelectromechanical systems (MEMS) technologies, devices, and systems are being used by Department of Energy (DOE) researchers and their collaborators to customize solutions for a wide range of applications. These micrometer-scale machines are being incorporated into inertial and pressure sensors, electronics and radio frequency filters, microfluidic devices, optical systems, photovoltaic technologies, and national security applications. MEMS benefits include new material development at the nanometer scale, increased information capabilities, and increased functionality, reliability, and autonomy for the systems where they are used.
A great example of the MEMS technology currently being used at DOE laboratories is the tiny oscillating mirror in the image (above). It is only the width of a few hairs. Scientists at Argonne National Laboratory, created the MEMS mirror to manipulate high-intensity X-rays, which will allow researchers to select extremely brief but precise X-ray bursts for their experiments.
Dr. William Watson, a physicist with the Office of Scientific and Technical Information (OSTI), provides a layman’s overview of MEMS systems in his latest white paper In the OSTI Collections – MEMS. He also provides an extensive set of DOE MEMS research sources and organizations for reference. Additional information about this important research is provided throughout DOE databases in OSTI’s Catalogue of Collections, resources, and related links below
Related Research Information in DOE Databases
DOE Science Resources
In the OSTI Collections: MEMS by Dr. William N. Watson
DOE PAGESBeta– journal articles and accepted manuscripts resulting from DOE funding.
SciTech Connect – reports from DOE science, technology and engineering programs.
DOepatents – a central collection of DOE patent information.
National Library of EnergyBeta – search results from across the DOE Complex.
U.S. Federal Science Resources
Science.gov – search results from U.S. federal science agencies.
Global Science Information
WorldWideScience.org – search results from global science agencies.
Additional Resources
What Is MEMS? MEMS Industry Group
There’s Plenty of Room at the Bottom, Richard Feynman
In 1959, Caltech physicist Richard Feynman presented the concept of making microscale machines, and even nanoscale machines that “arrange the atoms the way we want” and do chemical synthesis by mechanical manipulation. It was not until the 1990s that these concepts gained interest in scientific literature. See Wikipedia for additional information.
Micro ElectroMechanical systems (MEMS), The University of Utah
This proposal was submitted to the Defense Advanced Research Projects Agency in 1986 introducing the term “microelectromechanical systems.”
The Beginner’s Guide to MEMS Processing, MEMS & Nanotechnology Exchange
Responder Technology Alert (February 2015), SciTech Connect
ORNL researchers tune friction in ionic solids at the nanoscale, Oak Ridge National Laboratory
Microelectromechanical Systems (MEMS), Sandia National Laboratories
Researching new detectors for chemical, biological threats, Sandia National Laboratories
The Department of Energy Artificial Retina project, ScienceCinema
Engineering Institute - Structural Health Monitoring/Methodology, Los Alamos National Laboratory
Nanoscale Machines: These Squeaky Wheels Will Get No Grease, ScienceCinema
MEMS Glossary, MEMS & Nanotechnology Exchange
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